Pure · Ultra-pure Water System
ITEMS | GRADE1 | GRADE2 | GRADE3 | |
Resistivity (㏁ ·㎝ at 25℃) | 17.5 | 18 | 18.2 | |
TOC(ppb) | 20 | 5 | 1 | |
Particles | ≥0.1㎛ | 20 | 5 | 0.1 |
(pcs/㎖) | ≥0.05㎛ | 1.0 | ||
Bacteria (cfu/100㎖) | 50 | 1.0 | 0.1 | |
Dissolved Oxygen (ppb) | 10 | 1 |
将利用尖端工艺实现了工艺的简易化并便于维护管理的经济型
Package System应用于燃料电池用水处理系统等领域。